Sources of variability in scaled MoS2 FETs

Through advances in growth, cleaning, and device fabrication, our scaled MoS2 FET flow has reached sufficient maturity to study variability. We show devices with median SSmin 80mV/dec and I-max>100 mu A/mu m and find that thinning down the MoS2 channel from three to one layer results in strongly reduced SS and V-T variability, despite the presence of second layer MoS2 crystals. The scaling of sigma V-T with device dimensions of the thin-channel MoS2 FETs with EOT=2.6nm is found nearly on par with state-of-the-art Si finFETs at EOT=0.8nm, with a Pelgrom slope of A(Vt)=2.8mV.mu m. Finally, by directly correlating physical characterization, electrical measurements and 3D TCAD simulations, we identify second layer islands as a significant contributor to SS degradation and variability.