期刊
MICROSCOPY RESEARCH AND TECHNIQUE
卷 84, 期 4, 页码 782-788出版社
WILEY
DOI: 10.1002/jemt.23636
关键词
analytical method; atomic force microscope; hydrodynamic effect; mode sensitivity; sidewall cantilever
资金
- National Foundation for Science and Technology Development [103.01-2019.345]
This paper investigates the dynamic behavior and resonance frequencies of an atomic force microscope cantilever with sidewall probe immersed in liquid. A closed-form expression is derived and numerical analysis is used to calculate the flexural resonance frequencies. The effects of sidewall length and normal stiffness on the frequency are studied, as well as the surface-coupled effect between the cantilever and simple surface.
In this paper, dynamic behavior and the resonance frequencies of flexural vibration modes of an atomic force microscope cantilever with sidewall probe immersed in liquid to surface stiffness variations have been investigated and a closed-form expression is derived. Using numerical analysis, the flexural resonance frequencies of microcantilever immersed in liquid are calculated and the results are compared with the air environment. Then, the effect of sidewall length and normal stiffness on the frequency is investigated. Moreover, the surface-coupled effect between the cantilever and simple surface when the cantilever is close to the surface is considered and its effect on the quality factors of the first to fourth modes is studied.
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