期刊
PLASMA PROCESSES AND POLYMERS
卷 18, 期 2, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.202000183
关键词
growth kinetics; maleic anhydride; nanostructures; plasma polymerization; substrate chemistries
The surface chemistry of silicon wafers influences the morphogenesis of maleic anhydride plasma polymer, leading to different film morphologies depending on the hydrophilic or hydrophobic nature of the substrate surface. Homogeneous and dense polymer films form on hydrophilic substrates due to strong plasma species affinity, while elongated nanostructures grow on hydrophobic surfaces with lower plasma species affinity, resulting in a less dense polymer film.
The impact of surface chemistry on the morphogenesis of maleic anhydride plasma polymer is investigated on silicon wafers with very well-controlled surface chemistries (i.e., native oxide, hydroxyl-rich, and alkyl-rich). A particular attention is paid to characterize the early stages of growth. Two different morphologies of polymer films are obtained, depending on the hydrophilic or hydrophobic nature of the substrate surface, even though the chemical composition is very similar. Homogeneous and dense polymer films are formed on hydrophilic substrates due to the strong affinity of plasma species toward the surface. Elongated nanostructures resulting in a less dense polymer film grow on the hydrophobic surface, which are assumed to be the result of the low affinity of plasma species.
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