期刊
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
卷 22, 期 1, 页码 95-105出版社
KOREAN SOC PRECISION ENG
DOI: 10.1007/s12541-020-00433-6
关键词
Fused silica optics; CO2 laser mitigation; UV laser conditioning; Damage detection; Integrated multi-station system
资金
- National Natural Science Foundation of China [51775147, 51705105]
- Science Challenge Project [TZ2016006- 0503-01]
- Young Elite Scientists Sponsorship Program by CAST [2018QNRC001]
- China Postdoctoral Science Foundation [2018T110288, 2017M621260]
- Self-Planned Task of State Key Laboratory of Robotics and System (HIT) [SKLRS201718A, SKLRS201803B]
- Fundamental Research Funds for the Central Universities [HIT.NSRIF. 2019053]
An integrated multi-station system has been designed to detect and mitigate surface damage on fused silica optics, utilizing UV laser conditioning and CO2 laser mitigation to enhance damage resistance and prolong service life of the optics. The system significantly saves installation time and improves positioning accuracy, demonstrating great significance for off-line detecting and mitigating surface damage in high power laser facilities.
In high power laser facility, irreversible damage on fused silica optics, induced by laser irradiation or processing, seriously affects the service life of optics. Therefore, the work of inhibiting damage growth has been carried out in various countries. In our work, an integrated multi-station system is designed to detect and mitigate surface damage on fused silica. The process of processing fused silica optics include UV laser conditioning, surface damage detection and surface damage mitigation with CO2 laser. UV laser conditioning pre-initiates surface damage on fused silica optics with the laser flux less than Laser-Induced Damage Threshold (LIDT). Images of surface damage acquired from camera are processed by improved global threshold segmentation algorithm to extract damage information. Finally, CO2 laser is applied to process the damage with specific morphology to enhance the laser damage resistance. This integrated multi-station system saves the repeated optics installation time between the workstations with the positioning accuracy of 20 mu m. Furthermore, the damage with diameter of 10 mu m is mitigated to prolong service life of processed fused silica optics. The efficient and accurate integrated multi-station system is of great significance for off-line detecting and mitigating surface damage of fused silica optics in high power laser facility.
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