期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 68, 期 1, 页码 49-52出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2020.3037888
关键词
AlGaN/GaN heterostructure; gate dielectric; gate leakage current; metal-insulator-semiconductor high-electron-mobility transistor (MIS-HEMT); plasma-enhanced atomic layer deposition (PEALD)-SiN
资金
- National Natural Science Foundation of China [61534007, 61527816, 61822407, 62074161, 11634002, 61631021]
- Key Research Program of Frontier Sciences, Chinese Academy of Sciences (CAS) [QYZDB-SSW-JSC012]
- National Key Research and Development Program of China [2016YFB0400105, 2017YFB0403000]
- Youth Innovation Promotion Association of CAS
- University of Chinese Academy of Sciences
- Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, CAS
The article demonstrates a Ka-band AlGaN/GaN MIS-HEMT with SiN gate dielectric grown by PEALD, which significantly reduces gate reverse leakage current, improves breakdown voltage, and delivers high output power density and peak power-added efficiency.
A Ka-band AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistor (MIS-HEMT) with SiN gate dielectric grown by plasma-enhanced atomic layer deposition (PEALD) is demonstrated. The gate reverse leakage current in a controlled HEMT is reduced by about three orders of magnitude by the PEALD-SiN, contributing to an improved breakdown voltage of 92.5 V (source-drain separation of 2.0 mu m) in the fabricated MIS-HEMTs. The MIS-HEMTs also feature small threshold voltage hysteresis in dc transfer and capacitance-voltage characterizations, suggesting a good PEALD-SiN/AlGaN interface. The fabricated MIS-HEMTs deliver a high output power density of 7.16 W/ mm and a peak power-added efficiency of 60.3%, respectively, at V-DS = 30 V and V-DS = 10 V in pulse mode at 28 GHz. PEALD-SiN could be a compelling gate dielectric for fabrication of high-power and high-efficiency MIS-HEMTs.
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