期刊
ACS APPLIED ELECTRONIC MATERIALS
卷 3, 期 1, 页码 170-175出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.0c00876
关键词
reverse patterning lithography; patterned GaAs; microcontact printing; microstructuring; self-assembled monolayers; SAMs
资金
- National Science Foundation [CHE-1710561]
- Robert A Welch Foundation [E-1320]
- Texas Center for Superconductivity at the University of Houston
- Advanced Manufacturing Institute at the University of Houston
Reverse patterning lithography (RPL) combines microcontact printing of a custom-designed fluorinated adsorbate on gallium arsenide (GaAs) and the deposition of a polymeric resin as a wet-etching resist, allowing for the formation of positive patterns on GaAs wafers with various designed shapes and sharp edges at a high lateral resolution and depth, cost-effectively and time-efficiently.
This paper introduces reverse patterning lithography (RPL), which combines microcontact printing (mu CP) of a custom-designed fluorinated adsorbate on gallium arsenide (GaAs) and the deposition of a polymeric resin as a wet-etching resist. Positive patterns were formed on GaAs wafers having various designed shapes and sharp edges at a lateral resolution of 100.0 pm and a depth of up to 3.0 mu m. The RPL method benefits from being cost-effective and time-efficient compared to conventional photo-lithography and has the potential for use in the fabrication of various GaAs devices, including solar cells, light-emitting diodes, and microwave and radio frequency transistors.
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