INFLUENCE OF THE TEMPERATURE OF MOLYBDENUM SUBSTRATES ON THE STRUCTURE OF DIAMOND COATINGS OBTAINED BY CHEMICAL VAPOR DEPOSITION FROM A HIGH-SPEED MICROWAVE PLASMA JET

We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 degrees C, 690 degrees C, and 1000 degrees C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

Automated summary

The study shows that as the substrate temperature increases, diamond crystals enlarge in size, their density on the substrate increases, and the quality and crystal surface purity are also enhanced.