期刊
ACS APPLIED ELECTRONIC MATERIALS
卷 3, 期 2, 页码 711-719出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.0c00864
关键词
microelectronic device; hydrazine; ammonia; interfering gas; single-walled carbon nanotube
资金
- National Aeronautics and Space Administration (NASA) [80NSSC18C0082]
Microelectronic devices utilizing functionalized single-walled carbon nanotubes showed selective and sensitive detection of trace hydrazine in the presence of high-concentration interfering gases. The devices demonstrated fast response, high sensitivity, excellent reproducibility, and reliability for hydrazine detection, with a linear relationship between sensor response and hydrazine concentration. Field-emission scanning electron microscopy images revealed the morphology of the carbon nanotubes on the devices, and gas exposure tests demonstrated high sensor selectivity for hydrazine over interfering gases.
Microelectronic devices (MEDs) that utilize functionalized single-walled carbon nanotubes (SWCNTs) for hydrazine (HZ) sensing applications were developed and investigated, demonstrating their selective and sensitive detection of trace level HZ (0.01 ppm) in the presence of high-concentration interfering gases in ambient air at room temperature. These MEDs were fabricated with excellent reproducibility by the site-specific deposition of functionalized SWCNTs using a dielectrophoretic technique. Rigorous gas exposure testing conducted on these MEDs demonstrated a fast response with high sensitivity, selectivity, reproducibility, and reliability for detecting HZ. A dynamic response range was established from a linear relationship between the sensor response and the concentration of HZ (0.01 to 0.33 ppm). Additionally, these MEDs exhibited a linear trend relationship between device resistance and sensor response, which provided tunability in selecting and fabricating devices for improving sensing response. Field-emission scanning electron microscopy images showed the morphology of SWCNTs as a bundle on MEDs. Additional analytic gas exposure tests revealed negligible responses from these MEDs for high concentrations of interfering gases, such as 300 +/- 17 ppm methanol (MeOH), 85 +/- 6 ppm ethanol (EtOH), 145 +/- 12 ppm formaldehyde (CH2O), and 500 ppm ammonia (NH3), compared to that of HZ (<= 0.33 ppm), with HZ to interfering gas concentration ratios of 1:900, 1:250, 1:440, and 1:1500, respectively, demonstrating high sensor selectivity for HZ.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据