期刊
INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY
卷 15, 期 2, 页码 225-233出版社
FUJI TECHNOLOGY PRESS LTD
关键词
on-machine measurement; ultrahigh precision machine tool; confocal chromatic probe
The study introduces a new OMM system with a confocal chromatic probe on a five-axis ultrahigh precision machine tool for profile measurement. The system has a precision of around +/- 10 nm, deteriorating at slope angles of +/- 45 degrees but estimated to be within +/- 100 nm at angles within +/- 15 degrees.
An on-machine measurement (OMM) system is an effective apparatus for achieving an efficient profile compensation and improving machining conditions in ultrahigh precision machining. Herein, we report a new OMM system with a confocal chromatic probe on a five-axis ultrahigh precision machine tool constructed using a real-time position capturing method. The probe and machine tool positions are captured synchronously using a personal computer to generate profile measurement data. Long- and short-term stability, micro step response, and repeatability tests using an optical flat indicates that the system has a precision of approximately +/- 10 nm. The profile measurement test using a reference sphere indicates that the precision of the OMM system deteriorated at a large slope angle of +/- 45 degrees. However, the overall accuracy is estimated to be within +/- 100 nm at a slope angle within +/- 15 degrees. The linearity test at various slope angles indicates that the decrease in reflected light from a mirror-like surface deteriorates the performance of the probe.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据