期刊
IEEE JOURNAL OF MICROWAVES
卷 1, 期 2, 页码 601-609出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMW.2021.3064825
关键词
Microwave acoustics; resonators; filters; aluminum nitride; lithium niobate; lithium tantalate; electromechanical; quality factors; microsystems
This paper provides a short review of exciting material innovations and performance advancements in the field of microwave acoustics over the past decade. By evaluating fundamental parameters and discussing future outlooks, it aims to capture the rationales behind achieving higher performance microsystems in this area of research.
This paper presents a short review of the microwave acoustics area, where exciting material innovations and performance advancements have been made in the past decade. The ever-growing demand for more sophisticated passive signal processing functions on-chip has fueled these developments. As a result, microwave acoustic devices have maintained performance leadership in mobile applications. By evaluating three fundamental parameters, namely electromechanical coupling (k(2)), quality factors, and frequency scalability, of microwave acoustics, this paper aims to, extensively but not exhaustively, capture the rationales behind approaches achieving higher performance microsystems. Outlooks for different material systems and addressing their underlying challenges are also offered in hopes of establishing a balanced roadmap for future microwave acoustics development.
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