期刊
ACS APPLIED ELECTRONIC MATERIALS
卷 3, 期 3, 页码 1031-1042出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.0c01071
关键词
oxide thin films; ion beam irradiation; material property tuning; strongly correlated oxides; defect engineering
资金
- National Natural Science Foundation of China [11975102]
- Guangdong Pearl River Talent Program [2017GC010281]
- International Atomic Energy Agency [F11020, 21063]
Multifunctional oxide thin films with properties like ferroelectricity, piezoelectricity, and superconductivity have long been a focus of research. Ion beam irradiation is emerging as an effective method to modify these properties. This review comprehensively discusses the applications of ion beam irradiation in tailoring oxide thin film functionalities, providing potential pathways for developing enhanced performance devices.
Multifunctional oxide thin films exhibit a broad palette of properties, such as ferroelectricity, piezoelectricity, dielectricity, superconductivity, and metal-insulator transition (MIT); therefore, they have long been a research focus in both condensed matter physics and materials science communities. Recently, ion beam irradiation emerges as an effective approach to modify the properties of oxide thin films by introducing defects, strains, structural transitions, etc., and many interesting works have been published. A timely review of those works is therefore urgently needed. Here, we present a comprehensive review of the applications of ion beam irradiation in tailoring oxide thin film functionalities, including ferroelectric properties, dielectric and piezoelectric properties, multilevel MIT process, gas sensitivity, memristive behavior, and magnetic characters, which may be useful for developing capacitors, sensors, memories, and optical devices with enhanced performances. Finally, we discuss the challenges and future perspectives for the usage of ion beam irradiation for tuning the performance of oxide materials and devices.
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