期刊
IEEE SENSORS JOURNAL
卷 21, 期 10, 页码 11999-12008出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2021.3065694
关键词
Sensors; Acoustics; Surface acoustic wave devices; Surface treatment; Surface acoustic waves; Silicon; Microfluidics; Cell patterning; cell manipulation; acoustic tweezers; surface acoustic wave; acoustofluidics; Rayleigh wave; polysilicon surface micromachining
资金
- Hong Kong Research Grants Council [CityU 11218118]
Acoustically driven techniques can precisely pattern and move particles and cells, but the manipulation characteristics may change when applied to surfaces with microfabricated structures. Demonstrating a high cell viability on the SMS chip shows the potential of integrating microfabricated sensors with acoustically driven manipulation capabilities for bio-applications.
Particles and cells can be patterned and moved (i.e., manipulated) precisely using acoustically driven techniques. To date, application of acoustic particle manipulation has been limited to plain surfaces. There is much potential for applying acoustic manipulation techniques to surfaces with microfabricated structures for high-throughput sensing. But adding thin film structures could alter manipulation characteristics compared to a plain surface. Using a two-chip setup that allows the wave generating device to be reused, we study the feasibility of acoustofluidic micro-manipulation on a surface-micromachined silicon (SMS) chip. The SMS chip is a complex superstrate with generic thin-film structures fabricated by patterning and etching multiple layers of thin films, with properties meant to represent a broad range of microfabricated devices. We report notable alterations in the particle separation distances on the SMS chip compared to a bare silicon superstrate, which we attribute to a change in wave type through a comparison of different superstrates prepared. We demonstrate a high cell viability after acoustic manipulation of live cells on the SMS chip. The results herein demonstrate the possibility of integrating a suite of microfabricated sensors on a chip with acoustically driven manipulation capabilities for multiplexed sensing and analysis for bio-applications.
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