4.6 Article

Extremely Low Leakage Threshold Switch with Enhanced Characteristics via Ag Doping on Polycrystalline ZnO Fabricated by Facile Electrochemical Deposition for an X-Point Selector

期刊

ACS APPLIED ELECTRONIC MATERIALS
卷 3, 期 5, 页码 2309-2316

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.1c00197

关键词

electrochemical deposition; silver; doping; selector; threshold switch; cross-point array

资金

  1. GRC-LMD Program by the Semiconductor Research Corporation (SRC) [2823.001]
  2. Kangwon National University
  3. MOTIE (Ministry of Trade, Industry, and Energy) in Korea [P0008750]

向作者/读者索取更多资源

This study addresses common drawbacks in threshold switching devices in cross-point memory arrays by lightly doping the switching layer with silver to improve threshold voltage variability and cycling endurance. Limiting the amount of silver improved switching characteristics. Different mechanisms causing device failure were also discussed, with an unlimited silver source leading to short-circuited failures and a limited silver source resulting in open-circuit failures after repeated measurements.
Leakage current, that causes interferences in the read/write operation, arising from neighboring unselected or half-selected memory cells is considered as one of the main hurdles to be overcome to increase density of cross-point memory arrays. In this work, the common drawbacks for a Ag-based steep-slope threshold switching selector, threshold voltage variability, and poor cycling endurance have been mended. This is achieved by lightly doping the switching layer with Ag instead of implementing the Ag active electrode that acts as a reservoir, which provides unlimited access of Ag to the selector medium. Here, we doped polycrystalline ZnO with Ag, fabricated by facile electrochemical deposition, making a prototypical candidate for the crystalline switching layer. When the amount of Ag is limited by doping, switching characteristics, that is, threshold voltage variability and cycling endurance, are improved. Lastly, different mechanisms causing a threshold switching device to fail are also discussed for the two different test vehicles. It has been found that an unlimited Ag source causes the devices to fail in a short-circuited manner, and a limited Ag source results in devices to fail in an open-circuited manner, after repeated measurements.

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