Inclined Substrate Deposition of Nanostructured TiO2 Thin Films for DSSC Application

Nanostructured TiO2 films were deposited onto Indium Tin Oxide (ITO) and glass substrates by dc reactive magnetron sputtering at different substrate inclination angles. The structural and optical properties of the deposited films were studied by X-ray diffraction, scanning electron microscopy and UV-Vis spectrophotometer, respectively. Dye-sensitized solar cells (DSSC) were assembled using these TiO2 films as photoelectrodes and the effect of the substrate inclination angle in the preparing process of TiO2 films on the DSSC conversion efficiency was studied.

Automated summary

Nanostructured TiO2 films were deposited on Indium Tin Oxide (ITO) and glass substrates using dc reactive magnetron sputtering at various substrate inclination angles. The structural and optical properties of the films were analyzed using X-ray diffraction, scanning electron microscopy, and UV-Vis spectrophotometer. Dye-sensitized solar cells (DSSC) were constructed with these TiO2 films as photoelectrodes, and the impact of substrate inclination angle during film preparation on DSSC conversion efficiency was investigated.