Micropump Fluidic Strategy for Fabricating Perovskite Microwire Array-Based Devices Embedded in Semiconductor Platform

Microfluidic technologies are used to precisely manipulate fluid flow to integrate solution-processed materials in semiconductor devices. Here, a microfluidic method for incorporating perovskite into semiconductor-based devices is developed by embedding perovskite microwires (MWs) in Si microchannel platforms, The method relies on pumping a solution containing perovskite from the source to be precisely injected into Si microchannel arrays using filter paper that acts as a mesh of nano-/micropumps, owing to the capillary forces, Mask-free laser interference lithography is used to fabricate Si microchannels. Advanced characterization demonstrates that high-quality MWs are confined perfectly within the microchannel platform. Theoretical simulation is used to study the microfluidic mechanism. A high-performance photodetector based on the perovskite/Si MW array is obtained. Owing to this method's simplicity, low cost, and zero chemical waste, it could pave the way for manufacturing cost-effective miniaturized perovskite in semiconductor platforms for a wide range of applications, including lab-on-a-chip technology.

Automated summary

Microfluidic method for incorporating perovskite into semiconductor devices is developed by embedding perovskite microwires in Si microchannel platforms, relying on filter paper as nano-/micropumps. High-quality microwires are confined perfectly within the microchannel platform, and theoretical simulation is used for studying the microfluidic mechanism.