期刊
JOURNAL OF MATERIALS CHEMISTRY C
卷 9, 期 36, 页码 12224-12230出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/d1tc02512k
关键词
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资金
- Spanish Ministry of Science and Innovation through the Severo Ochoa FUNFUTURE [CEX2019000917-S, MAT2017-85232-R, PID2020112548RB-I00, PID2019-107727RB-I00]
- CSIC through the i-LINK [LINKA20338]
- Generalitat de Catalunya [2017 SGR 1377]
- 2020 Leonardo Grant for Researchers and Cultural Creators, BBVA Foundation
- Ramon y Cajal [RYC-2017-22531]
- China Scholarship Council (CSC) [201807000104]
- European Commission through the project TIPS [H2020-ICT-02-2014-1644453]
- French National Research Agency (ANR) [ANR-15-CE08-0034, ANR-17-CE05-0018]
- CNRS through the MITI interdisciplinary programs (project NOTE)
- Agence Nationale de la Recherche (ANR) [ANR-17-CE05-0018] Funding Source: Agence Nationale de la Recherche (ANR)
La-doped HfO2 films, even as thin as 4.5 nm, exhibit robust ferroelectric properties including high remanent polarization, slight wake-up, endurance of at least 10(10) cycles, and retention of over 10 years.
Stabilization of the orthorhombic phase of HfO2 with La allows very high polarization and endurance to be achieved. However, these properties have not been confirmed yet in films having a thickness of less than 10 nm. We have grown (111)-oriented La (2 at%) doped epitaxial HfO2 films on SrTiO3(001) and Si(001) substrates, and report on the thickness dependence of their ferroelectric properties. Films of less than 7 nm thickness show a high remanent polarization of about 30 mu C cm(-2), slight wake-up, an endurance of at least 10(10) cycles and a retention of more than 10 years, with the endurance and retention measured at the same poling voltage. La-doped HfO2 films even as thin as 4.5 nm also show robust ferroelectric properties.
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