3.8 Article

Homeotropic liquid crystal alignments through periodically unidirectional nano-wedges patterned by nanoimprint lithography

期刊

MICRO AND NANO ENGINEERING
卷 12, 期 -, 页码 -

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ELSEVIER
DOI: 10.1016/j.mne.2021.100090

关键词

Liquid crystal; Homeotropic alignment; Nanoimprint; Grayscale electron beam lithography

资金

  1. National Science Council of Taiwan [NSC 1002221E006161]

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This study demonstrates the fabrication of periodically unidirectional nano-wedges using nanoimprint lithography to improve LC alignments and optical performance in sandwiched LC cells. The experiment results show that nano-wedge structures can achieve better LC alignments and fewer disclination lines than nanorectangles in the cells.
This study demonstrates the fabrication of periodically unidirectional nano-wedges using nanoimprint lithography to achieve homeotmpic alignments in sandwiched liquid crystal (LC) cells. When electrically operating LC cells for the purpose of electro-optical performance without the occurrence of disclination lines, the LC pretilt angles play an essential role in achieving uniform LC alignments and well-behaved device functions. The periodical nano-wedges composed of asymmetrically sawtooth-like units were just designed for providing LC pretilt angles. We used grayscale electron beam lithography to fabricate nanoimprint master templates with periodically unidirectional nano-wedges with a 1-mu m pitch. The photoresist SU-8 was used as the nanoimprint polymer to form nano-wedge structures. An ultrathin poly(dimethylsiloxane) (PDMS) film was coated on the nano-wedges to assist homeotropic LC alignments. The fabricated nano-wedges were capable of better LC alignments than nanorectangles in the cells, including fewer disclination lines and better optical performance, as supported by the data obtained.

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