High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range

We demonstrate high-quality (intrinsic Q factor similar to 2.8 x 10(6)) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of similar to 86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.

Automated summary

The research showcased high-quality microresonators fabricated on lithium niobate thin film with the ability to tune resonance wavelength by integrating microelectrodes. The fabrication process involved photolithography assisted chemo-mechanical etching for achieving a tuning range spanning over a full FSR.