MEMS MICROPHONE WITH 73dBA SNR IN A 4mm x 3mm x 1.2mm PACKAGE

This paper reports on the development of a conventional constrained-diaphragm capacitive MEMS microphone that outperforms the highest performing MEMS microphones available in the market today. The design concept is to minimize MEMS acoustic damping losses to improve the signal-to-noise-ratio (SNR) using the finite-element analysis (FEA) to study the effect of different MEMS parameters on damping. The architecture is very simple and standard silicon-based processes are used for MEMS fabrication. With optimization, 73dBA SNR and -34dBV/Pa sensitivity has been achieved and very good correlation between simulated and measured frequency response and noise spectrum has been demonstrated.

Automated summary

This paper presents the development of a conventional constrained-diaphragm capacitive MEMS microphone that achieves superior performance compared to other MEMS microphones on the market. By minimizing MEMS acoustic damping losses through finite-element analysis (FEA), the microphone was able to improve its signal-to-noise ratio (SNR). The simple architecture and use of standard silicon-based processes for MEMS fabrication led to successful optimization, resulting in a 73dBA SNR and -34dBV/Pa sensitivity, with a strong correlation between simulated and measured frequency response and noise spectrum.