期刊
IEEE ACCESS
卷 9, 期 -, 页码 144264-144269出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/ACCESS.2021.3118386
关键词
O-doped ZrN; self-rectifying RRAM; Schottky barrier type bottom electrode; read margin
资金
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education [NRF-2020R1F1A1048423]
- Korea Institute for Advancement of Technology (KIAT) - Ministry Of Trade, Industry, and Energy (MOTIE)
- Competency Development Program for Industry Specialist [P0012451]
The study investigates the self-rectifying characteristics of p-Si/O-doped ZrN/TiN structures to overcome interference between neighboring cells in array structures. The proposed device shows nonlinear selection characteristics and a rectifying region within -2V, suppressing interference during reading operation. It exhibits the highest current ratio at -4.5V and maximum current limiting capability above -2V, with stable retention and high read margin at 125 degrees C.
In this study, we investigated the self-rectifying characteristics of p-Si/O-doped ZrN/TiN structures in order to overcome a disturbance between neighboring cells in array structures. The proposed device shows a nonlinear selection characteristic and a Schottky diode property in the positive bias region. We also observed the rectifying region within -2 V, which suppresses the interference with neighboring cells that occurs during a reading operation. Any RS phenomena is not observed especially for the reverse bias sweep to reset the proposed device, which indicated that the proposed device has an intrinsic rectifying property. The proposed device shows the highest current ratio of 6 x 10(2) at -4.5 V and a maximum current limiting capability in the bias region above -2 V. In addition, the O-doped ZrN memory device shows a stable retention up to 10(4) seconds at 125 degrees C as well as a high read margin of 380. Therefore, the proposed device suppresses interference in the read operation without additional selector elements, enabling stable memory operation.
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