4.6 Article

Band Gap Engineering in β-Ga2O3 for a High-Performance X-ray Detector

期刊

ACS APPLIED ELECTRONIC MATERIALS
卷 3, 期 10, 页码 4630-4639

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.1c00778

关键词

band gap engineering; Al-doped gallium oxide crystals; X-ray detectors; high resistivity; high sensitivity

资金

  1. National Natural Science Foundation of China [11975168]
  2. Equipment Pre-research Fund Key Project [6140922010601]

向作者/读者索取更多资源

Al-doped beta-Ga2O3 single crystals with high resistivity were obtained through band gap engineering in this study, resulting in the preparation of a high-performance X-ray detector with high sensitivity and fast response speed. The detector demonstrated significantly higher performance compared to commercial amorphous Se X-ray detectors, with a sensitivity 42 times higher and both rise time and decay time less than 0.05 s. The high performance was attributed to the high resistivity and quality of the crystal.
Gallium oxide (Ga2O3) attracts great attention in the field of X-ray detection because of its ultrawide band gap, high breakdown electric field, and high X-ray absorption coefficient. However, unintentionally doped Ga2O3 tends to have low resistivity because of the shallow donors provided by unintentionally doped impurity elements or intrinsic defects. Iron and magnesium ion doping can increase the resistivity of beta-Ga2O3, but the carrier drift length and carrier collection efficiency are greatly reduced because of the introduction of deep-level impurities. Here, Al-doped beta-Ga2O3 (beta-Ga2O3:Al) single crystals with high resistivity are obtained through band gap engineering. The mechanism by which Al3+ doping can increase the resistivity of the beta-Ga2O3 crystal is discussed. A beta-Ga2O3:15%Al-based X-ray detector with high resistivity and quality is prepared. The detector demonstrates a high sensitivity of 851.6 mu C Gy(air) (-1) cm(-2), which is 42 times higher than that of the commercial amorphous Se X-ray detector. Furthermore, the detector exhibits a fast response speed and both rise time and decay time of less than 0.05 s. The high performance of the detector is attributed to the high resistivity and high quality of the crystal. This work presents a method to obtain highperformance X-ray detectors based on beta-Ga2O3 single crystals through band gap engineering.

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