期刊
出版社
IEEE
DOI: 10.1109/RFIT52905.2021.9565306
关键词
Thin Si-substrate chip; millimeter wave; deep Si-Etch; Lapping; ICP-RIE
资金
- wSMA project of the Institute of Astronomy and Astrophysics, Academia Sinica, Taipei, Taiwan
- Center for Astrophysics, Harvard & Smithsonian, Cambridge, MA, USA
The flexible process for fabricating thin Si-substrate chips used in millimeter-wave waveguide devices involves accurately defining the chip geometry through a deep Si-etch process, and ensuring thickness accuracy of the Si-substrate through backside lapping and dry etch processes. As examples, two thin Si-substrate millimeter wave chips with substrate thickness of 20 micrometers are presented.
A flexible process for fabricating thin Si-substrate chips, implemented in millimeter-wave waveguide devices, had been developed. The geometry of chip was accurately defined by a deep Si-etch process. The thickness accuracy of Si-substrate is better than 2 micrometers by performing the backside lapping and then the dry etch processes. Two thin Si-substrate millimeter wave chips with substrate thickness of 20 micrometers are presented as examples.
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