期刊
PROCEEDINGS OF INTERNATIONAL WORKSHOP ON IMPEDANCE SPECTROSCOPY (IWIS 2021)
卷 -, 期 -, 页码 11-14出版社
IEEE
DOI: 10.1109/IWIS54661.2021.9711851
关键词
MEMS; Dry Film Photoresist; Electrical Impedance Spectroscopy; Electrical Equivalent Circuit; Microelectrode; Microfluidic
资金
- Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) [SCHN 587/24-1, FL 1033/2-1]
This study focused on the capability of building a microfluidic system using three-level laminated dry film photoresists, demonstrating the feasibility of performing electrical impedance spectroscopy on single microspheres and achieving a significant increase in impedance values by trapping the sphere in the aperture.
Micro-electro-mechanical systems (MEMS) often require thick structures with high aspect ratios. To fulfill this specification, lamination of thick dry film photoresists (DFR) is preferred. To demonstrate the capability, we developed a microfluidic system, which consists of a 3-level laminated SUEX DFR with an aperture and served as a hydrodynamic trap. Two embedded vertically arranged electrodes around the aperture enabled electrical impedance spectroscopy ( EIS) on single microspheres. In a proof-of-concept, EIS measurements were carried out between 500 Hz and 1 MHz on a single poly(methyl methacrylate) (PMMA) sphere with a diameter of 100 mu m. The spectra were analyzed using an equivalent electric circuit model. A significant increase in impedance values was obtained by trapping the PMMA sphere in the aperture.
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