期刊
INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021)
卷 -, 期 -, 页码 -出版社
IEEE
DOI: 10.1109/IUS52206.2021.9593339
关键词
PMUT; Spiral Archimedean; Emission pressure
资金
- Natural Science Foundation of China (NSFC) [62001322]
- Tianjin Municipal Science and Technology Project [20JCQNJC011200]
- National Key Research and Development Program [2020YFB2008801]
- Nanchang Institute for Microtechnology of Tianjin University
Piezoelectric MEMS ultrasonic transducers have advantages of low power consumption and small size. The key performance is the acoustic emission performance. A new spiral Archimedean PMUT array is proposed in this paper, showing 18% higher acoustic emission pressure along the axis compared to traditional structures.
Piezoelectric MEMS ultrasonic transducers have advantages of low power consumption and small size, which brings a broad application prospect. The key performance on the development of the transducer is the acoustic emission performance, and most existing research focus on the structural optimization of a single PMUT element. In this paper, a spiral Archimedean PMUT array is proposed, which can generate greater axial sound pressure. The finite element simulation was carried out for the proposed array, and then the transducer array was fabricated. The test results show that the proposed array structure has 18% higher acoustic emission pressure along the axis than the traditional ones.
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