Low-loss Bi-layer Edge Couplers for Blue Light

We report low-loss silicon nitride bi-layer fiber-to-chip edge couplers on 200-mm silicon wafers for visible spectrum photonic circuits. The minimum per-facet coupling loss at lambda=488nm was similar to 2.6dB (TM), and polarization-independent coupling was achieved with similar to 3.2-dB loss. (C) 2021 The Author(s)

Automated summary

A novel low-loss silicon nitride bi-layer fiber-to-chip edge coupler was reported on 200-mm silicon wafers for visible spectrum photonic circuits, achieving minimum per-facet coupling loss around 2.6dB at lambda=488nm (TM) and polarization-independent coupling with around 3.2-dB loss.