期刊
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
卷 71, 期 -, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2021.3130203
关键词
Sensors; Capacitors; Parasitic capacitance; Micromechanical devices; Capacitive sensors; Capacitance measurement; Instruments; Capacitance measurement; capacitive readout; capacitive sensor
资金
- National Key Research and Development Program of China [2018YFF01010902]
- National Natural Science Foundation of China [51705405]
In this article, a capacitive readout system with automatic parasitic capacitance cancellation function is designed and implemented. The system cancels out parasitic capacitance by matching a digital programmable capacitor. The experimental results show that the system achieves small measurement errors when measuring ceramic capacitors and MEMS micromirrors.
In this article, a capacitive readout system with automatic parasitic capacitance cancellation function is designed and implemented. The readout system is implemented with discrete components on a board level. The parasitic cancellation is realized by matching a digital programmable capacitor to the parasitic capacitance using a PI controller. The function of the readout system is verified by using standard ceramic capacitors and a MEMS micromirror device. Capacitance measurements up to 35 pF for ceramic capacitors are performed, the maximum error between the measurement results of the circuit and an LCR meter is 0.07 pF. For MEMS micromirror, the circuit cancels the parasitic capacitance of 32.63 pF and realizes a measurement error within 0.06 pF. The proposed system can be used as a proof-of-concept platform demonstrating the feasibility of the generic parasitic cancellation method for MEMS sensors and actuators.
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