期刊
ACS SENSORS
卷 1, 期 11, 页码 1301-1307出版社
AMER CHEMICAL SOC
DOI: 10.1021/acssensors.6b00428
关键词
photothermal spectroscopy; mid-infrared; silicon photonics; microring resonator; gas sensing
资金
- Research Foundation Flanders (FWO)
- CheckPack IWT project - Flemish government
Mid-infrared spectroscopic techniques rely on the specific fingerprint absorption lines of molecules in the mid-infrared band to detect the presence and concentration of these molecules. Despite being very sensitive and selective, bulky and expensive equipment such as cooled mid-infrared detectors is required for conventional systems. In this paper, we demonstrate a miniature CMOS-compatible Silicon-on-Insulator (SOI) photothermal transducer for mid-infrared spectroscopy which can potentially be made in high volumes and at a low cost. The optical absorption of an analyte in the mid infrared wavelength range (3.25-3.6 mu m) is thermally transduced to an optical transmission change of a microring resonator through the thermo-optic effect in silicon. The photothermal signal is further enhanced by locally removing the silicon substrate beneath the transducer, hereby increasing the effective thermal isolation by a factor of 40. As a proof-of-concept, the absorption spectrum of a polymer that has been locally patterned in the annular region of the resonator was recovered using photothermal spectroscopy. The spectrum is in good agreement with a benchmark Fourier-transform infrared spectroscopy (FTIR) measurement. A normalized noise equivalent absorption coefficient (NNEA) of 7.6 X 10(-6) W/Hz(1/2) is estimated.
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