期刊
DALTON TRANSACTIONS
卷 51, 期 13, 页码 5315-5321出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/d1dt04207f
关键词
-
资金
- C1 Gas Refinery Program through the National Research Foundation of Korea - Ministry of Science, ICT, and Future Planning, Republic of Korea [2018M3D3A1A01018006]
- Carbon through the National Research Foundation of Korea - Ministry of Science, ICT, and Future Planning, Republic of Korea [2020M3H7A1098259]
- National Research Foundation of Korea [2018M3D3A1A01018006, 2020M3H7A1098259] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
This article introduces a nonclassical and highly effective method for synthesizing mononuclear N,O-chelate zirconium complexes, which utilizes the ring-opening insertion of epoxide into zirconium complexes at room temperature. Experimental results demonstrate that the produced precursor complex enables satisfactory growth rate of ZrO2 in ALD.
A zirconium complex containing an N,O-chelate and alkylamide ligand has great potential for application in atomic layer deposition (ALD). However, the synthesis of this mononuclear Zr complex remains a major challenge because of the highly electrophilic nature and rich coordination of the Zr(iv) atom. Herein, a nonclassical and highly effective route for synthesizing the mononuclear N,O-chelate Zr complex was envisaged and verified using rationally designed reactions, involving the ring-opening insertion of epoxide into tetrakis(dimethylamido)zirconium(iv) (TDMAZ) at room temperature. To the best of our knowledge, very few studies in which mononuclear Zr complexes comprising alkylamide in combination with aminoalkoxide are structurally characterized. This method is extremely simple, atom economical, and easily scalable. Importantly, the produced precursor complex enables ALD of ZrO2 at a satisfactory growth rate (0.93 angstrom per cycle), close to that of the commercial ALD precursor CpZr(NMe2)(3) (0.9 angstrom per cycle).
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据