期刊
ACS APPLIED ELECTRONIC MATERIALS
卷 4, 期 4, 页码 1910-1920出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.2c00109
关键词
short-wave infrared focal plane array (SWIR FPA); sensitivity; solid immersion microlens arrays; fabrication compatibility; broad-band light coupling; focusing efficiency
资金
- W.M. Keck Foundation Award
- ARO [W911NF1810429]
- NIH [R21EY029516]
- MRSEC program at the Materials Research Center [NSF DMR-1720139]
- U.S. Department of Defense (DOD) [W911NF1810429] Funding Source: U.S. Department of Defense (DOD)
Solid immersion microlens arrays can improve the sensitivity of infrared focal plane arrays by focusing light into the most sensitive part of each pixel. This research presents an all-in-one solution for producing solid immersion microlens arrays compatible with various infrared FPAs, regardless of their substrate material. The implementation of this method in short-wavelength infrared FPAs demonstrated a 7.4 times improvement in quantum efficiency.
The sensitivity of infrared (IR) focal plane arrays (FPAs) is often limited by a low pixel fill factor. Solid immersion microlens arrays address this problem by focusing the light reaching each pixel into the most sensitive part of that pixel. This strategy is used in CMOS image sensors but has not been industrially adopted for IR FPAs due to significant difficulties in integration with compound semiconductors. Here, we present an all-in-one solution for producing solid immersion microlens arrays compatible with various IR FPAs regardless of their substrate material. Our strategy is to use refractive lenses made of SiO2 and Si3N4 with very broad-band and efficient focusing abilities. Notably, our strategy works across a broad range of wavelengths with little performance degradation, meaning it is scalable to various applications. We implemented our method in short-wavelength IR FPAs and demonstrated 7.4 times improvement in quantum efficiency. This is the first demonstration of an immersion microlens array in a non-silicon infrared FPA.
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