期刊
NPJ FLEXIBLE ELECTRONICS
卷 6, 期 1, 页码 -出版社
NATURE PORTFOLIO
DOI: 10.1038/s41528-022-00179-3
关键词
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资金
- National Natural Science Foundation of China [51972319, 62027818, 61874034, 12175298, 51861135105]
- Natural Science Foundation of Shanghai [18ZR1405000, 20ZR1464100]
- Science and Technology Commission of Shanghai Municipality [19520744400]
This article presents a high responsivity and fully flexible Ta-doped beta-Ga2O3 DUV phototransistor with outstanding optoelectrical properties and mechanical flexibility, showing potential applications in UV imaging and artificial intelligence.
Deep-ultraviolet (DUV) phototransistors have shown great potential applications in UV imaging, artificial intelligence, and wearable optoelectronics. Among a large number of wide bandgap semiconductors, the quasi-two-dimensional beta-Ga2O3 is considered as an ideal candidate for DUV photodetector applications. Herein, we report a high responsivity (R) and fully flexible Ta-doped beta-Ga2O3 DUV phototransistor which exhibits outstanding optoelectrical properties with a high R of 1.32 x 10(6) A/W, a large detectivity of 5.68 x 10(14) Jones, a great photo-to-dark current ratio of 1.10 x 10(10)%, a high external quantum efficiency of 6.60 x 10(8) %, and an ultra-fast response time of similar to 3.50 ms. Besides, the flexible Ta-doped beta-Ga2O3 device also displays high reliability and mechanical flexibility that can sustain well after over 1 x 10(4) bending cycles. Moreover, high-contrast imaging of UV light was obtained on the flexible DUV detector arrays, which can be efficiently trained and recognized by an artificial neural network. Our findings offer a perspective to develop wearable optoelectronics and UV imaging based on high-performance flexible beta-Ga2O3 DUV phototransistors, providing an inspiration for the future work in artificial intelligence and bionic robot fields.
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