期刊
IEEE SENSORS LETTERS
卷 6, 期 7, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LSENS.2022.3182007
关键词
Mirrors; Optical variables measurement; Sensors; Piezoresistive devices; Optical sensors; Electromagnetics; Frequency measurement; Sensor-actuators; complementary metal-oxide semiconductor (CMOS); electromagnetic actuation; piezoresistive sensor; scanning mirror
资金
- Ministry of Science and Technology, Taiwan [MOST 110-2221-E-007-119-MY3]
This letter presents the fabrication and performance testing results of a dual-axis electromagnetically-driven piezoresistive sensed scanning mirror. The fabricated structure is very thin and achieves large optical angles with good drive efficiency.
This letter presents a dual-axis electromagnetically-driven piezoresistive sensed scanning mirror fabricated in a 0.35-mu m complementary metal-oxide semiconductor (CMOS) process. The fabricated structure is 60 mu m thick and contains a 3-mm diameter mirror. The drive coil consists of two CMOS metal layers, and the piezoresistive sensors are implemented using n-well and polysilicon resistors for comparison. The measured optical angles for vertical and horizontal scans were 19.1 degrees and 37.7 degrees at 0.418 and 1.205 kHz, respectively. This design exhibited good drive efficiency with corresponding drive currents of 3.7 and 24.9 mA(pp), respectively.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据
分享论文
