4.6 Article

Thermal stress-assisted annealing to improve the crystalline quality of an epitaxial YSZ buffer layer on Si

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Nanoscience & Nanotechnology

Epitaxial ferroelectric oxides on silicon with perspectives for future device applications

Matjaz Spreitzer et al.

Summary: The research on functional oxides grown on silicon has been ongoing for over 20 years, focusing on the quality of material integration due to thermodynamic incompatibility. Recent advancements have enabled the epitaxial growth of transition metal oxides on silicon with improved crystalline quality. The applications of epitaxial ferroelectric oxides in piezoelectric microelectromechanical systems, electro-optical components, and catalysis are explored, with a focus on manipulating electronic structures at the interfaces for desired coupling with semiconductors.

APL MATERIALS (2021)

Article Physics, Applied

Growth of Pr2Ir2O7 thin films using solid phase epitaxy

Takumi Ohtsuki et al.

JOURNAL OF APPLIED PHYSICS (2020)

Article Materials Science, Multidisciplinary

Domain engineering of epitaxial (001) Bi2Te3 thin films by miscut GaAs substrate

Kwang-Chon Kim et al.

ACTA MATERIALIA (2020)

Article Chemistry, Multidisciplinary

3D architectures of single-crystalline complex oxides

Shin-Ik Kim et al.

MATERIALS HORIZONS (2020)

Article Materials Science, Multidisciplinary

Epitaxial SrTiO3 film on silicon with narrow rocking curve despite huge defect density

Z. Wang et al.

PHYSICAL REVIEW MATERIALS (2019)

Article Nanoscience & Nanotechnology

Epitaxial Integration on Si(001) of Ferroelectric Hf0.5Zr0.5O2 Capacitors with High Retention and Endurance

Jike Lyu et al.

ACS APPLIED MATERIALS & INTERFACES (2019)

Review Materials Science, Coatings & Films

Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Gregory Abadias et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2018)

Article Materials Science, Multidisciplinary

The Influence of Annealing Temperature on Amorphous Indium-Zinc-Tungsten Oxide Thin-Film Transistors

Ruofan Fu et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2018)

Article Multidisciplinary Sciences

Growth mechanism of epitaxial YSZ on Si by Pulsed Laser Deposition

David Dubbink et al.

SCIENTIFIC REPORTS (2018)

Article Multidisciplinary Sciences

Tensile stress effect on epitaxial BiFeO3 thin film grown on KTaO3

In-Tae Bae et al.

SCIENTIFIC REPORTS (2018)

Article Multidisciplinary Sciences

Tailoring Lattice Strain and Ferroelectric Polarization of Epitaxial BaTiO3 Thin Films on Si(001)

Jike Lyu et al.

SCIENTIFIC REPORTS (2018)

Review Nanoscience & Nanotechnology

Thin-film ferroelectric materials and their applications

Lane W. Martin et al.

NATURE REVIEWS MATERIALS (2017)

Article Chemistry, Multidisciplinary

Effect of in situ stress on grain growth and texture evolution in sputtered YSZ/Si films

Amiya Banerjee et al.

RSC ADVANCES (2017)

Article Chemistry, Multidisciplinary

Dislocations Accelerate Oxygen Ion Diffusion in La08Sr0.2MnO3 Epitaxial Thin Films

Edvinas Navickas et al.

ACS NANO (2017)

Article Multidisciplinary Sciences

Free-electron creation at the 60° twin boundary in Bi2Te3

Kwang-Chon Kim et al.

NATURE COMMUNICATIONS (2016)

Article Physics, Applied

Growth of epitaxial orthorhombic YO1.5-substituted HfO2 thin film

Takao Shimizu et al.

APPLIED PHYSICS LETTERS (2015)

Review Materials Science, Multidisciplinary

A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

Lucie Mazet et al.

SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS (2015)

Article Chemistry, Physical

Strain effect on the adsorption, diffusion, and molecular dissociation of hydrogen on Mg (0001) surface

Huaping Lei et al.

JOURNAL OF CHEMICAL PHYSICS (2013)

Article Materials Science, Multidisciplinary

Evolution kinetics of interstitial loops in irradiated materials: a phase-field model

Shenyang Hu et al.

MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING (2012)

Proceedings Paper Engineering, Electrical & Electronic

Epitaxial PZT thin films on YSZ-buffered Si (001) substrates for piezoelectric MEMS or NEMS applications

Corentin Jorel et al.

E-MRS 2012 SPRING MEETING, SYMPOSIUM M: MORE THAN MOORE: NOVEL MATERIALS APPROACHES FOR FUNCTIONALIZED SILICON BASED MICROELECTRONICS (2012)

Article Physics, Applied

Ferroelectricity in yttrium-doped hafnium oxide

J. Mueller et al.

JOURNAL OF APPLIED PHYSICS (2011)

Article Multidisciplinary Sciences

Giant Piezoelectricity on Si for Hyperactive MEMS

S. H. Baek et al.

SCIENCE (2011)

Article Chemistry, Multidisciplinary

Domain Engineering for Enhanced Ferroelectric Properties of Epitaxial (001) BiFeO Thin Films

Ho Won Jang et al.

ADVANCED MATERIALS (2009)

Article Materials Science, Multidisciplinary

Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films

David J. Quinn et al.

JOURNAL OF MATERIALS RESEARCH (2008)

Article Physics, Applied

Electrooptic properties of epitaxial lead zirconate titanate films on silicon substrates

Kazuaki Kurihara et al.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS (2007)

Review Physics, Applied

Ferroelectric thin films: Review of materials, properties, and applications

N. Setter et al.

JOURNAL OF APPLIED PHYSICS (2006)

Article Materials Science, Multidisciplinary

Characterization of defect type and dislocation density in double oxide heteroepitaxial CeO2/YSZ/Si(001) films

CH Chen et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2003)

Article Materials Science, Multidisciplinary

Dislocation plasticity in thin metal films

O Kraft et al.

MRS BULLETIN (2002)