In situ mechanical characterization of CoCrCuFeNi high-entropy alloy micro/nano-pillars for their size-dependent mechanical behavior

High entropy alloys (HEAs), as a new kind of alloys with equi-or near equi-atomic alloy compositions, have recently received increased interest, but their mechanical properties at micro- and nanoscales are less studied, which could hinder their structural/functional applications in the small scales. In this work, the mechanical responses of single crystalline FCC-structured CoCrCuFeNi HEA micro- and nano-pillars were systematically investigated by an in situ SEM nanoindenter. The yield strengths of the HEA micro-/nano-pillars under uniaxial compression appear to be size-dependent (with them value of similar to 0.46 in the Hall-Petch law relationship), but less sensitive when compared to typical metal/alloy micro-and nano-structures (e.g. with themvalues of 0.6-0.9 for FCC metals). We also observed and analyzed the slip systems of the plastically deformed micro-/nano-pillars, and discussed their deformation mechanisms together with the Young's modulus by multiple loading/unloading compressions experiments. Our results could provide useful insights in the design and application of HEA for functional micro-and nano-devices.