4.0 Article

A comparison study of ZnO, InZnO, GaZnO and InGaZnO physical properties and optical bandgap

期刊

INTERNATIONAL JOURNAL OF NANOTECHNOLOGY
卷 19, 期 2-5, 页码 241-251

出版社

INDERSCIENCE ENTERPRISES LTD
DOI: 10.1504/IJNT.2022.124505

关键词

ZnO; InZnO; GaZnO; InGaZnO; physical; bandgap

资金

  1. Malaysia Ministry of Education (MOE) under LRGS (Wide Band Gap Semiconductor) [203/CINOR/6720013]

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This study compares the differences in the characteristics of ZnO, InZnO, GaZnO, and InGaZnO thin films prepared using the spin coating method. It investigates the contributions of In and Ga towards changes in the physical properties and analyzes the surface distribution of grains using FESEM and AFM. Additionally, the study discusses the optical band gap and elemental atomic percentage of the thin films.
Comparison between ZnO, InZnO, GaZnO and InGaZnO (IGZO) thin films prepared using spin coating method were studied in detail to find out contribution of In and Ga towards changes in the physical properties. From FESEM, ZnO has revealed an uneven and non-uniform distribution of grains on the film. The addition of In has caused the grains to be more separated and inconsistent in sizes. Ga, on the other hand has transformed the grain to be more hexagonal in shape and the surface was more packed with grains. AFM analysis has shown dissimilar topographies and surface roughness values to complement FESEM results. Additionally, optical band gap and elemental atomic percentage of ZnO, InZnO, GaZnO and InGaZnO thin films were also analysed and discussed in this study.

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