期刊
LASER-BASED MICRO- AND NANOPROCESSING XVI
卷 11989, 期 -, 页码 -出版社
SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.2609576
关键词
Airy beams; Borosilicate glass; Diffractive optical elements; Laser beam shaping; Laser materials processing; Numerical analysis
The use of Airy-Gauss beam for cutting and shaping glass sheets is studied, with research on plasma ignition in the side lobes of the beam and surface damage issues, providing numerical results on creating symmetric convex edge on a 920 μm thick glass sheet with simple optical adjustments.
When glass sheets are cut to shape, ultra short laser pulses with an elongated, usually straight, focal volume (line focus) can be used to modify the workpiece throughout its entire depth with one single laser shot. At the same time, processed glass is often required to have a seamed or round edge, which usually requires an extra grinding step. Alternatively, curved line foci can be used to combine cutting and edge shaping of glass sheets in one laser process. We reconsider the Airy-Gauss beam for this purpose. Plasma ignition in the side lobes of the Airy beam and surface damage provoke unwanted effects, in particular an asymmetric laser modification of the glass sheet. We provide numerical results on the origins of the asymmetry of the volume modification and show that with rather simple optical adjustments a symmetric convex edge can be created in a 920 mu m thick glass sheet.
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