期刊
RSC ADVANCES
卷 12, 期 35, 页码 22974-22983出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/d2ra01338j
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资金
- Programm zur Forderung des exzellenten wissenschaftlichen Nachwuchses from the University Duisburg-Essen
- Interdisciplinary Center for Analytics on the Nanoscale (ICAN) of the University of Duisburg-Essen
- DFG [RI_00313]
Partially fluorinated beta-diketonate complexes were synthesized and compared with related complexes, showing positive thermal effects on metal acetylacetonates without clear trends. These complexes used as precursors in MOCVD process can yield metal or metal oxide thin films.
Partially fluorinated beta-diketonate complexes M(tfac)(2)(TMEDA) (M = Fe 1, Ni 2, Cu 3, Zn 4; tfac = 1,1,1-trifluoro-2,4-pentanedionate; TMEDA = N,N,N',N'-tetramethylethylenediamine) were synthesized and structurally (sc-XRD) and thermochemically (TGA) characterised. A new polymorph of Fe(tfac)(2)(TMEDA) was found. The structural and physicochemical properties of 1-4 were compared with related M(acac)(2)(TMEDA) and M(hfac)(2)(TMEDA) (acac = 2,4-pentanedionate, hfac = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate) beta-diketonate complexes to evaluate the effect of the degree of fluorination. A positive effect on the thermal behaviour of the metal acetylacetonates was observed, but no discernible trends. Application of complexes 1-4 as precursors in a MOCVD process yielded either metal (Ni, Cu) or metal oxide thin films (Fe3O4, ZnO), which were further oxidized to NiO, CuO and alpha-Fe2O3 films by calcination in air at 500 degrees C.
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