Planar Multilayer Circuit Quantum Electrodynamics

Experimental quantum information processing with superconducting circuits is rapidly advancing, driven by innovation in two classes of devices, one involving planar microfabricated (2D) resonators, and the other involving machined three-dimensional (3D) cavities. We demonstrate that circuit quantum electrodynamics can be implemented in a multilayer superconducting structure that combines 2D and 3D advantages. We employ standard microfabrication techniques to pattern each layer, and rely on a vacuum gap between the layers to store the electromagnetic energy. Planar qubits are lithographically defined as an aperture in a conducting boundary of the resonators. We demonstrate the aperture concept by implementing an integrated, two-cavity-mode, one-transmon-qubit system.