A simple and reliable microfabrication process for a programmable microvalve array

We describe our reliable methodology for fabricating a complex programmable microvalve array (PMA) and its integration with a glass microcapillary electrophoresis chip. This methodology is applicable to any device that requires multilayered PDMS, multiple alignment processes, selective PDMS bonding, and multilayered integration with downstream sensing systems. Along with the detailed step-by-step process, we discuss essential quality assurance checks that can be performed throughout fabrication to assist in troubleshooting and maximizing chip yield.center dot Comprehensive instructions for designing and fabricating a programmable microvalve array.center dot Selective bonding of PDMS and glass by microcontact printing.center dot Numerous quality control procedures to boost chip yield.(c) 2022 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY license ( http://creativecommons.org/licenses/by/4.0/ )

Automated summary

This article describes a reliable methodology for fabricating a complex programmable microvalve array and integrating it with a glass microcapillary electrophoresis chip. The method is applicable to any device that requires multilayered PDMS, multiple alignment processes, selective PDMS bonding, and multilayered integration with downstream sensing systems.