4.7 Article

Range-Extended Confocal Chromatic Sensor System for Double-Sided Measurement of Optical Components With High Lateral Resolution

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2022.3216679

关键词

Confocal chromatic sensor (CCS); opto-mechatronic system; range extension; surface metrology

资金

  1. Christian Doppler Research Association
  2. Austrian Federal Ministry for Digital and Economic Affairs
  3. National Foundation for Research, Technology and Development
  4. ATENSOR Engineering and Technology Systems GmbH
  5. Micro-Epsilon Messtechnik GmbH Company KG

向作者/读者索取更多资源

This article presents a strategy to overcome the tradeoff between the thickness measuring range and lateral imaging resolution of a confocal chromatic sensor (CCS) by combining it with a linear stage. The proposed mechatronic approach successfully extends the measuring range by a factor of 17 while preserving the lateral resolution for thickness measurements. The proposed measurement scheme is validated by measuring lateral surface features on a 1.2-mm-thick lenslet array from the backside.
This article presents a strategy to break the tradeoff between the thickness measuring range of a confocal chromatic sensor (CCS) and its lateral imaging resolution. By combining the sensor with a linear stage, the thickness measuring range is no longer limited by chromatic dispersion, but by the focusing power of the sensor optics. The principle is demonstrated with a prototype setup that utilizes a CCS with a spot size of 6 mu m and a spec-sheet thickness measuring range of 300 mu m. By implementing the proposed mechatronic approach, a successful extension of the measuring range by a factor of 17 is achieved while preserving the lateral resolution of 2.46 mu m for thickness measurements. The proposed measurement scheme is validated by measuring lateral surface features on a 1.2-mm-thick lenslet array from the backside.

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