Atomic Layer Deposition for Lithium-Based Batteries

With the increasing demand for energy at a low cost and minimal environmental impact, the development of next-generation high-performance batteries has drawn considerable attention. Owing to the capability of forming conformal coatings of thin films and nanoparticles, atomic layer deposition (ALD) has shown great potential in deposition and surface modification of electrode materials with various nanostructures, deposition of solid-state electrolyte, and fabrication of electrochemical catalysts. This paper reviews the recent development and applications of ALD in Li-based batteries, especially beyond Li-ion systems, and provides suggestions for further development of ALD techniques for these batteries.