期刊
ACS PHOTONICS
卷 3, 期 2, 页码 209-214出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.5b00660
关键词
diffractive optics; dielectric metasurface; silicon nitride photonics; lens; vortex beam generator
类别
资金
- National Science Foundation [0335765, 1337840]
- Washington Research Foundation
- M. J. Murdock Charitable Trust
- GCE Market
- Class One Technologies
- University of Washington, Seattle
- Intel Early Career Faculty Award
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1337840] Funding Source: National Science Foundation
The miniaturization of current image sensors is largely limited by the volume of the optical elements. Using a subwavelength-patterned quasi-periodic structure, also known as a metasurface, one can build planar optical elements based on the principle of diffraction. Recent demonstrations of high quality metasurface optical elements are mostly based on high refractive-index materials. Here, we present a design of low contrast metasurface-based optical elements. We fabricate and experimentally characterize several silicon nitride-based lenses and vortex beam generators. The fabricated lenses achieved beam spots of less than 1 pm with numerical apertures as high as similar to 0.7S. We observed a transmission efficiency of 90% and focusing efficiency of 40% in the visible regime. Our results pave the way toward building low-loss metasurface-based optical elements at visible frequencies using low-contrast materials and extend the range of prospective material systems for metasurface optics.
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