期刊
ACS PHOTONICS
卷 3, 期 6, 页码 912-918出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.6b00080
关键词
VCSELs; fluorescence sensors; lasers; flexible electronics; transfer printing
类别
资金
- DARPA YFA program [N66001-12-1-4244]
- National Science Foundation [CMMI-1068212]
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1436872] Funding Source: National Science Foundation
We present mechanically flexible opto-fluidic fluorescence sensors based on heterogeneously integrated microscale vertical cavity surface emitting lasers (micro-VCSELs) and silicon photodiodes (Si-PDs). Micro- and millimeters-scale, printable forms of 850 nm-emitting micro-VCSELs and Si-PDs are coassembled into integrated fluorescence sensor arrays over large area in flexible, liquid proof constructions on a polyethylene terephthalate (PET) substrate, where lithographically defined optical isolation trenches and multilayer-based wavelength- and angle-selective spectral filters are incorporated to effectively block the wave guided and reflected excitation light to the Si-PD and, thus, significantly enhance the signal-to-noise ratio and detection limit. The resulting optoelectronic fluorescence sensors integrated with elastomeric fluidic channels on plastics also enable mechanically bendable operation at a bending radius of down to 50 mm, as well as multiplexed, real-time monitoring of fluorescent analytes flown through the opto-fluidic channels, with minimum detectable luminophore concentration of 5 x 10(-5) wt %.
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