Wide-range Vacuum Measurements from MWNT Field Emitters Grown Directly on Stainless Steel Substrates

The field emission properties and the vacuum measurement application are investigated from the multi-walled carbon nanotubes (MWNTs) grown directly on catalytic stainless steel substrates. The MWNT emitters present excellent emission properties after the acid treatment of the substrate. The MWNT gauge is able to work down to the extreme-high vacuum (XHV) range with linear measurement performance in wide range from 10(-11) to 10(-6) Torr. A modulating grid is attempted with improved gauge sensitivity. The extension of the lower pressure limit is attributed largely to low outgassing effect due to direct growth of MWNTs and justified design of the electron source.