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A Uranga et al.
ELECTRONICS LETTERS (2005)
Elastic PMLs for resonator anchor loss simulation
DS Bindel et al.
INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING (2005)
A film bulk acoustic resonator in liquid environments
H Zhang et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2005)
Silicon resonant accelerometer with electronic compensation of input-output cross-talk
V Ferrari et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
A Y type SAW mass sensor with metal array reflectors
Y Ying et al.
SENSORS AND ACTUATORS B-CHEMICAL (2005)
Electrically coupled MEMS bandpass filters - Part 1: With coupling element
S Pourkamali et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Electrically coupled MEMS bandpass filters - Part II. Without coupling element
S Pourkamali et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Micromachined acoustic resonant mass sensor
H Zhang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)
Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
I Voiculescu et al.
IEEE SENSORS JOURNAL (2005)
Electromechanical transducers at the nanoscale: Actuation and sensing of motion in nanoelectromechanical systems (NEMS)
KL Ekinci
SMALL (2005)
Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
E Forsen et al.
APPLIED PHYSICS LETTERS (2005)
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
J Verd et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)
Nanoelectromechanical systems
KL Ekinci et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2005)
Nonlinear mechanical effects in silicon longitudinal mode beam resonators
V Kaajakari et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS
WM Zhang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
High-fidelity Modeling of MEMS resonators - Part 1: Anchor loss mechanisms through substrate
YH Park et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications
V Kaajakari et al.
IEEE ELECTRON DEVICE LETTERS (2004)
Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
G Piazza et al.
SENSORS AND ACTUATORS A-PHYSICAL (2004)
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
KL Ekinci et al.
JOURNAL OF APPLIED PHYSICS (2004)
Micromechanical mixer-filters (Mixlers)
AC Wong et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping
AH Nayfeh et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2004)
Nonlinear limits for single-crystal silicon microresonators
V Kaajakari et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
Long-term stability of single-crystal silicon microresonators
M Koskenvuori et al.
SENSORS AND ACTUATORS A-PHYSICAL (2004)
Series-resonant VHF micromechanical resonator reference oscillators
YW Lin et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2004)
1.156-GHz self-aligned vibrating micromechanical disk resonator
W Jing et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2004)
On the squeeze-film damping of micro-resonators in the free-molecule regime
S Hutcherson et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2004)
VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators - Part I: Design and modeling
Z Hao et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
Cantilever transducers as a platform for chemical and biological sensors
NV Lavrik et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2004)
Thin film piezoelectrics for MEMS
S Trolier-McKinstry et al.
JOURNAL OF ELECTROCERAMICS (2004)
An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations
ZL Hao et al.
SENSORS AND ACTUATORS A-PHYSICAL (2003)
Suspended microchannel resonators for biomolecular detection
TP Burg et al.
APPLIED PHYSICS LETTERS (2003)
Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry
ZJ Davis et al.
SENSORS AND ACTUATORS A-PHYSICAL (2003)
Single wafer encapsulation of MEMS devices
RN Candler et al.
IEEE TRANSACTIONS ON ADVANCED PACKAGING (2003)
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
S Pourkamali et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
A 300-μW 1.9-GHz CMOS oscillator utilizing micromachined resonators
BP Otis et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2003)
Femtogram mass detection using photothermally actuated nanomechanical resonators
NV Lavrik et al.
APPLIED PHYSICS LETTERS (2003)
Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators
D Lange et al.
SENSORS AND ACTUATORS A-PHYSICAL (2003)
Monolithic piezoresistive CMOS magnetic field sensors
V Beroulle et al.
SENSORS AND ACTUATORS A-PHYSICAL (2003)
A study of the nonlinear response of a resonant microbeam to an electric actuation
MI Younis et al.
NONLINEAR DYNAMICS (2003)
A parametric quartz crystal oscillator
V Komine et al.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2003)
Energy dissipation in submicrometer thick single-crystal silicon cantilevers
JL Yang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
A vacuum packaged surface micromachined resonant accelerometer
AA Seshia et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
Vacuum packaging technology using localized aluminum/silicon-to-glass bonding
YT Cheng et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
A 12 MHz micromechanical bulk acoustic mode oscillator
T Mattila et al.
SENSORS AND ACTUATORS A-PHYSICAL (2002)
Nonlinear micromechanical Casimir oscillator
HB Chan et al.
PHYSICAL REVIEW LETTERS (2001)
Smart single-chip gas sensor microsystem
C Hagleitner et al.
NATURE (2001)
A hermetic glass-silicon package formed using localized aluminum/silicon-glass bonding
YT Cheng et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2001)
Resonant accelerometer with self-test
M Aikele et al.
SENSORS AND ACTUATORS A-PHYSICAL (2001)
Monocrystalline silicon carbide nanoelectromechanical systems
YT Yang et al.
APPLIED PHYSICS LETTERS (2001)
High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology
F Ayazi et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)
Mechanical nonlinearities in a magnetically actuated resonator
T Bourouina et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2000)
High-Q HF microelectromechanical filters
FD Bannon et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2000)
Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging
YT Cheng et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)
Magnetic field measurements with a novel surface micromachined magnetic-field sensor
H Emmerich et al.
IEEE TRANSACTIONS ON ELECTRON DEVICES (2000)
Thermoelastic damping in micro- and nanomechanical systems
R Lifshitz et al.
PHYSICAL REVIEW B (2000)
VHF free-free beam high-Q micromechanical resonators
K Wang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)
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