相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Measurement of the Earth tides with a MEMS gravimeter
R. P. Middlemiss et al.
NATURE (2016)
Low Temperature Photosensitive Polyimide Based Insulating Layer Formation for Microelectromechanical Systems Applications
J. Fan et al.
JOURNAL OF ELECTRONIC MATERIALS (2015)
Polyimide-Damage-Free, CMOS-Compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation
W. J. Wu et al.
JOURNAL OF ELECTRONIC MATERIALS (2015)
Implementation of the scale factor balance on two pairs of quartz-flexure capacitive accelerometers by trimming bias voltage
L. C. Tu et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2014)
Resonant frequency detection and adjustment method for a capacitive transducer with differential transformer bridge
M. Hu et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2014)
Effects of surface treatment on the bonding quality of wafer-level Cu-to-Cu thermo-compression bonding for 3D integration
J. Fan et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2013)
Recent developments in MEMS sensors: a review of applications, markets and technologies
Robert Bogue
SENSOR REVIEW (2013)
Thermal Characteristics of InP-Al2O3/Si Low Temperature Heterogeneous Direct Bonding for Photonic Device Integration
J. Fan et al.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2013)
Wafer-level hermetic packaging of 3D microsystems with low-temperature Cu-to-Cu thermo-compression bonding and its reliability
J. Fan et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2012)
Test of the Gravitational Inverse Square Law at Millimeter Ranges
Shan-Qing Yang et al.
PHYSICAL REVIEW LETTERS (2012)
High resolution space quartz-flexure accelerometer based on capacitive sensing and electrostatic control technology
W. Tian et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2012)
New capacitive low-g triaxial accelerometer with low cross-axis sensitivity
Yu-Wen Hsu et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
U. Krishnamoorthy et al.
SENSORS AND ACTUATORS A-PHYSICAL (2008)
Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass
Reza Abdolvand et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2007)
Improved design of micromachined lateral suspensions using intermediate frames
W. T. Pike et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2007)
A flexible and wearable biosensor for tear glucose measurement
Shigehito Iguchi et al.
BIOMEDICAL MICRODEVICES (2007)
A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment
Hyung-Kew Lee et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)
Hermetic packaging using eutectic SnPb solder and Cr/Ni/Cu metallurgy layer
Annie T. Huang et al.
IEEE TRANSACTIONS ON ADVANCED PACKAGING (2006)
Micro-gravity capacitive silicon-on-insulator accelerometers
BV Amini et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2005)
A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer
J Chae et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2005)
An in-plane high-sensitivity, low-noise micro-g silicon accelerometer with CMOS readout circuitry
J Chae et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
Sub-10 cm3 interferometric accelerometer with nano-g resolution
NC Loh et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
A high-precision, wide-bandwidth micromachined tunneling accelerometer
CH Liu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2001)
High-resolution micromachined interferometric accelerometer
EB Cooper et al.
APPLIED PHYSICS LETTERS (2000)
分享论文
