期刊
MICROMACHINES
卷 7, 期 3, 页码 -出版社
MDPI
DOI: 10.3390/mi7030041
关键词
capillary self-alignment; superhydrophobic PDMS; stretchable electronics; hydrophilic/superhydrophobic patterned surfaces; soft micro devices
类别
资金
- Academy of Finland [275117]
- Academy of Finland (AKA) [275117, 275117] Funding Source: Academy of Finland (AKA)
Soft micro devices and stretchable electronics have attracted great interest for their potential applications in sensory skins and wearable bio-integrated devices. One of the most important steps in building printed circuits is the alignment of assembled micro objects. Previously, the capillary self-alignment of microchips driven by surface tension effects has been shown to be able to achieve high-throughput and high-precision in the integration of micro parts on rigid hydrophilic/superhydrophobic patterned surfaces. In this paper, the self-alignment of microchips on a patterned soft and stretchable substrate, which consists of hydrophilic pads surrounded by a superhydrophobic polydimethylsiloxane (PDMS) background, is demonstrated for the first time. A simple process has been developed for making superhydrophobic soft surface by replicating nanostructures of black silicon onto a PDMS surface. Different kinds of PDMS have been investigated, and the parameters for fabricating superhydrophobic PDMS have been optimized. A self-alignment strategy has been proposed that can result in reliable self-alignment on a soft PDMS substrate. Our results show that capillary self-alignment has great potential for building soft printed circuits.
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