期刊
MICROMACHINES
卷 7, 期 7, 页码 -出版社
MDPI
DOI: 10.3390/mi7070128
关键词
micro/nano fabrication; 3D laser fabrication; holographic lithography; single optical element; photonic crystals
类别
资金
- USA National Science Foundation [CMMI-1266251, ECCS-1407443]
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1266251] Funding Source: National Science Foundation
In this paper, we have systematically studied the holographic fabrication of three-dimensional (3D) structures using a single 3D printed reflective optical element (ROE), taking advantage of the ease of design and 3D printing of the ROE. The reflective surface was setup at non-Brewster angles to reflect both s- and p-polarized beams for the interference. The wide selection of reflective surface materials and interference angles allow control of the ratio of s- and p-polarizations, and intensity ratio of side-beam to central beam for interference lithography. Photonic bandgap simulations have also indicated that both s and p-polarized waves are sometimes needed in the reflected side beams for maximum photonic bandgap size and certain filling fractions of dielectric inside the photonic crystals. The flexibility of single ROE and single exposure based holographic fabrication of 3D structures was demonstrated with reflective surfaces of ROEs at non-Brewster angles, highlighting the capability of the ROE technique of producing umbrella configurations of side beams with arbitrary angles and polarizations and paving the way for the rapid throughput of various photonic crystal templates.
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