期刊
MICROMACHINES
卷 7, 期 5, 页码 -出版社
MDPI
DOI: 10.3390/mi7050083
关键词
all-glass valves; large-scale integration; microfluidic device
类别
资金
- ImPACT Program of the Council for Science, Technology and Innovation (Cabinet Office, Government of Japan)
- Japan Society for the Promotion of Science
In this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm x 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-m-diameter through-holes, between an ultra-thin glass sheet (4 m thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06-5.33 L/min. The maximum frequency of flow switching was approximately 12 Hz.
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