4.5 Article

Influence of Metal-Organic Vapor Phase Epitaxy Reactor Environment on the Silicon Bulk Lifetime

期刊

IEEE JOURNAL OF PHOTOVOLTAICS
卷 6, 期 6, 页码 1668-1672

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOTOV.2016.2598254

关键词

Diffusion processes; metal-organic vapor phase epitaxy (MOVPE); minority carrier lifetime; semiconductor impurities; silicon; silicon solar cell; III-V on silicon

资金

  1. German Federal Ministry of Education and Research through the project MehrSi [03SF0525A]
  2. German Federal Environmental Foundation (DBU)

向作者/读者索取更多资源

III-V multijunction solar cells grown on a Si solar cell are an attractive approach to reduce the cost of high-efficiency solar cells. When using the Si wafer as an active solar cell, it is crucial to avoid degradation of the minority carrier lifetime in the Si during the metal-organic vapor phase epitaxy (MOVPE) process. After heating a Si wafer in a MOVPE reactor under a H-2 atmosphere, we observed a strong degradation of its lifetime. By analyzing the annealed samples with photoluminescence and quasi-steadystate photoconductance, we found an iron contamination of up to 2 x 10(12)cm(-3). The measured iron concentration could be identified as the major source for the decrease of the minority carrier lifetimes of the Si wafers. By using diffusion barriers, we identified the graphite susceptor as the main source of the iron contamination. This knowledge offers pathways to preserve the minority carrier lifetime in the Si wafers during the MOVPE process.

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