4.5 Article

Modulating the Properties of SnO2 Thin Film by Post-Deposition UV-Ozone Treatment

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JOURNAL OF ELECTRONIC MATERIALS
卷 -, 期 -, 页码 -

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SPRINGER
DOI: 10.1007/s11664-023-10726

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Tin oxide; thin film; spray pyrolysis; UV-ozone treatment

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In this study, the effects of post-UV-ozone (UVO) treatment on SnO2 thin films were investigated. It was found that UVO treatment did not significantly affect the structural characteristics of the films, but resulted in a decrease in bandgap and an increase in defects. This led to a decrease in the ratio between band-to-band emission and defect emissions. These findings suggest that UVO treatment is an effective strategy for tuning the optical properties of SnO2 thin films by precisely controlling the bandgap.
Tin(IV) oxide (SnO2) is a metal oxide renowned for its excellent optoelectronic properties. With the use of simple post-processing methods, the characteristics of SnO(2 )may be easily modified. In the current work, SnO2 thin films were prepared using the spray pyrolysis technique and were subjected to post-UV-ozone (UVO) treatment for different durations. Characterization techniques including x-ray diffraction, Raman spectroscopy, scanning electron microscopy, energy-dispersive spectroscopy, UV-visible spectroscopy, and photoluminescence spectroscopy were employed to assess the effects of UVO treatment. It was found that UVO treatment had no significant impact on the film's structural characteristics. However, after exposure to UVO, the bandgap was seen to decrease from 3.04 eV to 2.84 eV. Also, photoluminescence investigations revealed that UVO treatment increased the defects in the films with a decrease in the ratio between band-to-band emission and defect emissions. The results indicate that UVO treatment is an effective strategy for tuning the optical properties of SnO2 thin films by precisely managing the bandgap.

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